FLUIDIZATION THIN METAL FILM FORMING DEVICE,申请号JP19870250014-传众专利搜索

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发明名称	FLUIDIZATION THIN METAL FILM FORMING DEVICE
摘要
申请公布号	JPH0192361(A)	申请公布日期	1989.04.11
申请号	JP19870250014	申请日期	1987.10.05
申请人	ULVAC CORP	发明人	OBINATA HISAHARU
分类号	C23C14/22;C23C14/24;C23C14/58;H01L21/28;H01L21/285	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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