Apparatus for adjusting a mask with at least one adjustment mark relative to a semi-conductor wafer provided with at least one lattice structure

摘要

The present invention is directed to positioning a mask having an adjustment mark relative to a semi-conductor wafer being provided with at least one lattice structure and is concerned with keeping the area of the adjustment mark and mask as small as possible and providing an easy distinguishing of the direction of misalignment therebetween. The adjustment mark comprises at least two groups of gratings having different grid directions. In order to distinguish between misalignment which occurs in opposite directions, different grid spacings are provided. Preferably, the patterns are in strips and the adjustment mark comprises strips.