Ion beam apparatus for finishing patterns,申请号US19870085991-传众专利搜索

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发明名称	Ion beam apparatus for finishing patterns
摘要
申请公布号	US4820898(A)	申请公布日期	1989.04.11
申请号	US19870085991	申请日期	1987.08.14
申请人	U.S. PHILIPS CORPORATION	发明人	SLINGERLAND, HENDRIK N.
分类号	G03F1/00;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):B23K15/00	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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