发明名称 METHOD FOR MANUFACTURING DEPOSITION MASK, AND DEPOSITION MASK
摘要 The present invention addresses the problem of providing a method for manufacturing, using a plating treatment, a deposition mask in which a through-hole having a complicated shape is formed. This method for manufacturing a deposition mask includes: a first film-forming step for forming, on a substrate having insulating properties, a first metal layer that is provided with a first opening in a predetermined pattern; and a second film-forming step for forming, on the first metal layer, a second metal layer that is provided with a second opening connected to the first opening. The second film-forming step includes: a resist forming step for forming a resist pattern on the substrate and the first metal layer so as to leave a predetermined gap; and a plating treatment step for depositing the second metal layer on the first metal layer in the resist pattern gap. The resist forming step is carried out such that the first opening in the first metal layer is covered by the resist pattern, and such that the gap in the resist pattern is located on the first metal layer.
申请公布号 WO2016129534(A1) 申请公布日期 2016.08.18
申请号 WO2016JP53581 申请日期 2016.02.05
申请人 DAI NIPPON PRINTING CO., LTD. 发明人 IKENAGA Chikao
分类号 C23C14/04;C25D1/08;H01L51/50;H05B33/10 主分类号 C23C14/04
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