发明名称 Coating and method for testing plano and spherical wavefront producing optical surfaces and systems having a broad range of reflectivities
摘要 An improved system for testing a full reflectivity range of optical surfaces employs an improved Fizeau spherical or plano wavefront interferometer comprising a laser source (2) and an optical element (18) located in the wavefront (16) having a reference surface (20) everywhere normal to the wavefront (16) which has a partially reflective, partially absorbtive, and partially transmissive beamsplitting coating (19) applied to the plano or spherical reference surface (20) and having a transmittance such that there will be only two beam interference and the contrast of the two beam interference fringes between the reflected reference wavefront (25R) and the reflected test wavefront (25T) will be substantially equalized at the two extremes of the test surface (28) reflectivity.
申请公布号 US4820049(A) 申请公布日期 1989.04.11
申请号 US19870109715 申请日期 1987.10.16
申请人 ZYGO CORPORATION 发明人 BIEGEN, JAMES F.
分类号 G01B9/02;(IPC1-7):G01B11/00 主分类号 G01B9/02
代理机构 代理人
主权项
地址