VERTICAL BETA VOLTAIC BATTERY STRUCTURE AND METHOD OF MANUFACTURING THEREOF

摘要

Disclosed are a vertical beta battery structure and a method for manufacturing the same. According to an embodiment of the present invention, the vertical beta battery structure includes a first type substrate, a first type electrode formed on the first type substrate, and a second type electrode formed in a trench structure on the first type substrate. A depletion layer vertically formed by PN joining between the first type substrate and the first type electrode is irradiated.