APPARATUS FOR EVALUATING FLATNESS OF THIN FILM

摘要

PURPOSE:To obtain the flatness of a thin film quantitatively without cutting, by optically observing the thin film of a substrate in many aspects, collecting and recording the data of reflected light from each light receiving sensor for a short time and outputting the data as required. CONSTITUTION:Luminous flux from a light emitting source 12 in an observing part 10 is projected on a stage 11. The reflected light is received with light receiving sensors 13-15. The outputs from the light receiving sensors are controlled with a controller 21. The intensity of the reflected light which is detected for a short time of about 50ms is recorded in a recorder 23 as a digital quantity through a computer 22. The data are outputted to an output device 24 as required. The measures as standards of flatness are obtained in correspondence with the patterns of the intensity distribution of the reflected light of various samples or various thin films. The flatness of the thin film can be quantitatively evaluated and obtained without cutting based on these database.