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发明名称
SUBSTRATE TRANSFER APPARATUS
摘要
申请公布号
JPS6490599(A)
申请公布日期
1989.04.07
申请号
JP19870248653
申请日期
1987.10.01
申请人
SANYO ELECTRIC CO LTD
发明人
NISHI NOBORU
分类号
B65G25/08;B23P19/00;B65G47/88;H05K13/02
主分类号
B65G25/08
代理机构
代理人
主权项
地址
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