Optical axis adjustment method for X-ray analyzer and X-ray analyzer

摘要

An optical axis adjustment method for an X-ray analyzer. In a 2θ-adjustment step, a 0° position of the rotation of a receiving-side arm and a 0° position of the angle of diffraction 2θ are aligned. In a Zs-axis adjustment step, the position of an incident-side slit along a direction orthogonal to the centerline of the X-rays incident upon a sample from an X-ray source is adjusted. In a θ-adjustment step, the centerline of X-rays incident upon the sample from the X-ray source and the surface of the sample are adjusted so as to be parallel. In the 2θ-adjustment step, the Zs-axis adjustment step, and the θ-adjustment step, the capability for X-ray intensity positional resolution upon a straight line possessed by a one-dimensional X-ray detector is used to perform 2θ-adjustment, Zs-axis adjustment, and θ-adjustment.

主权项

1. An optical axis adjustment method for an X-ray analyzer,
(A) the X-ray analyzer comprising:
an incident-side arm that rotates around a sample axis passing through a sample position constituting a position at which a sample is placed;a receiving-side arm that rotates around the sample axis and extends toward a side opposite the incident-side arm;an X-ray source provided on the incident-side arm;an incident-side slit provided on the incident-side arm between the sample position and the X-ray source; andan X-ray detector, provided on the receiving-side arm, and possessing X-ray intensity positional resolution, which is a function of detecting X-ray intensity within predetermined regions on a straight line,wherein:
an angle of incidence of X-rays incident upon the sample from the X-ray source is an angle of incidence θ; and an angle formed by the centerline of X-rays diffracted by the sample and the centerline of X-rays incident upon the sample is an angle of diffraction 2θ, (B) the optical axis adjustment method comprising:
a 2θ-adjustment step in which a 0° position of the rotation of the receiving-side arm and a 0° position of the angle of diffraction 2θ are aligned;a Zs-axis adjustment step in which the position of the incident-side slit along a direction orthogonal to the centerline of X-rays incident upon the sample from the X-ray source is adjusted; anda θ-adjustment step of adjusting the centerline of the X-rays incident upon the sample from the X-ray source and the surface of the sample so as to be parallel,wherein in the 2θ-adjustment step, the Zs-axis adjustment step, and the θ-adjustment step, the capability for X-ray intensity position resolution upon a straight line possessed by the X-ray detector is used to perform 2θ-adjustment, Zs-axis adjustment, and θ-adjustment, respectively.