High integrity process fluid pressure probe

摘要

A process fluid pressure measurement probe includes a pressure sensor formed of a single-crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid. The pressure sensor has an electrical characteristic that varies with process fluid pressure. A feedthrough is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough is mounted to a second metallic process fluid barrier and is spaced from, but electrically coupled to, the pressure sensor. The pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

主权项

1. A process fluid pressure measurement probe comprising:
a pressure sensor formed of a single crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid, the pressure sensor having an electrical characteristic that varies with process fluid pressure; a feedthrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and wherein the pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.