| 摘要 |
PURPOSE:To save an required amount of reaction gas and N2 gas by a construction wherein, in a reaction furnace having a susceptor which holds a material to be reacted and rotates around a reactor core, a tubular member open at the bottom and including openable parts is detachably mounted along the rovolving path of the susceptor. CONSTITUTION:A tubular member 15 is mounted on a bottom wall 14 at the center of the body 13 of a reaction furnace as a core part, so as to isolate the interior of the tubular member from that of the body 13. The tubular member 15 has at its lower side an opening 16 to be communicated with the atmosphere and includes at a part of its side wall openable windows 17 for maintenance and checking in the appropriate number. Over the body 13 is placed a flattened, conical tubular bell jar 18 which has its lower end side located in alignment with the open upper end of the body 13, and a releasable cover is put in position. The bell jar 18 is provided at its head part with a gas inlet port 19 through which gas such as monosilane or phosgene is introduced into the reaction furnace together with oxygen. At the lower part of the body 13, a turntable 25 in the form of a doughnut is arranged to be revolved around the core, and a susceptor 36 mounting thereon a wafer 11 is attached to the turntable 25 through a support shaft 32. |
