| 摘要 |
<p>PURPOSE:To enable smooth resumption of neutralization even when the neutralization is interrupted during operation by providing a means for determining quantitatively the amt. of neutralizing liquid, waste liquid and waste gas, etc., and a means for storing the memory of the discharging condition of said waste liquid, etc. CONSTITUTION:A neutralizing liquid storing section 1, a waste liquid neutralizing section 2, a waste gas neutralizing section 3 having at least two neutralizing tanks 16, 17, and a treating liquid storing section 4, are provided. Further, a measuring means 11, 18, 19 for measuring quantitatively neutralizing liquid to be sent to the neutralizing liquid neutralizing section 2 and the waste gas neutralizing section 3 from the neutralizing liquid storing section 1 are provided. Moreover, the amt. of the waste liquid and the waste gas to be sent to the neutralizing sections 2, 3 are determined quantitatively by measuring means 14, 22. Furthermore, the neutralizing liquid during neutralization is stirred by stirring means 8-10, 31, 32 in the neutralizing section 2, 3. Conditions of the liquid after neutralization in the stage of discharging to the storing section 4 are stored in discharging means 28-30. As the result, the safety and the efficiency in the stage of neutralization of liquid and gas discharged from an opening device of a semiconductor package are improved permitting also smooth resumption even in a stage of interruption of operation.</p> |
