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发明名称
SPINNER
摘要
申请公布号
JPS6489516(A)
申请公布日期
1989.04.04
申请号
JP19870247483
申请日期
1987.09.30
申请人
MATSUSHIMA KOGYO CO LTD
发明人
IKEDA AKIRA
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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