Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems,申请号US19880141812-传众专利搜索

发明名称	Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems
摘要
申请公布号	US4818838(A)	申请公布日期	1989.04.04
申请号	US19880141812	申请日期	1988.01.11
申请人	THE PERKIN-ELMER CORPORATION	发明人	YOUNG, LYDIA J.;VENEKLASEN, LEE H.
分类号	G03F7/20;H01J37/301;H01L21/027;H01L21/30;H01L21/677;(IPC1-7):B23K15/00	主分类号	G03F7/20
代理机构		代理人
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