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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS6489337(A)
申请公布日期
1989.04.03
申请号
JP19870245410
申请日期
1987.09.29
申请人
TOSHIBA CORP
发明人
MORITA SHIGERU
分类号
H01L21/31;H01L21/76
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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