| 摘要 |
PURPOSE:To perfectly clean a board without allowing foreign matter to re- deposit by rotating a brush in reverse to the forwarding direction of the board, tangentially supplying cleaning water in reverse to the rotating direction of the brush, and cleaning both surfaces of the board simultaneously for rough and final cleaning. CONSTITUTION:A board 1 is forwarded between rough cleaning brushes 6, 7 by being placed on a belt 2, facing a film layer 18 such as an electrode atop. The board 1, supported by a buffer bar 4 of a pressure board 3, has foreign matter present on both surfaces thereof eliminated by the brushes 6, 7 which rotate in reverse to the forwarding direction. The foreign matter whose mass is light and which has remained on the brushes is eliminated by injection of cleaning water from nozzles 8, 9, whereby the foreign matter is prevented from being deposited again on the board 1. Then by cleaning the board 1, which is held in a chuck base by being rotated in reverse, from the bottom using a finishing brush 14, the dropping of foreign matter due to specific gravity and contaminated cleaning water is prevented. The brushes 7, 6, one being hard and the other soft, are effective. |
