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发明名称
DEVICE FOR MANUFACTURING THIN FILM
摘要
申请公布号
JPS6489316(A)
申请公布日期
1989.04.03
申请号
JP19870244796
申请日期
1987.09.29
申请人
FUJI ELECTRIC CO LTD
发明人
ITO NAOKI
分类号
H01L21/205;H01L31/04
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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