发明名称 FORMATION OF METAL OXIDE FILM
摘要 PURPOSE:To efficiently and easily form a metal oxide film by coating a substrate with a mixed soln. contg. a metal carboxylate represented by a specified general formula, a thickener and a solvent and by heating and holding the mixed soln. at a temp. above the oxidation temp. of the carboxylate. CONSTITUTION:A substrate is coated with a mixed soln. contg. a metal carboxylate represented by a general formula M[CnH2n+1COO]m (where M is a metal, m is the coordination number of the metal M and n is an integer of 1-6), a thickener and a solvent. The mixed soln. for coating on the substrate is heated and held at least once at a temp. above the oxidation temp. of the carboxylate. The metal M is preferably a metallic element present in the 2nd - the 6th periods of the groups Ia, IIa, IIIb, IVb, Vb, VIb, VIIb, VIII, Ib, IIb, IIIa, IVa and Va of the periodic table. The thickener is preferably an org. thickener. Water is preferably used as the solvent but a mixture of water with an org. solvent may be used as required.
申请公布号 JPS6487779(A) 申请公布日期 1989.03.31
申请号 JP19870245517 申请日期 1987.09.29
申请人 HOYA CORP 发明人 HARA KOICHI;IKUSHIMA AKIRA;UCHIDA KATSUAKI
分类号 C23C18/12 主分类号 C23C18/12
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