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法人/股东/高管

发明名称
摘要
申请公布号	JPS6452232(U)	申请公布日期	1989.03.31
申请号	JP19870148829U	申请日期	1987.09.29
申请人		发明人
分类号	G03F7/00;H01L21/027;H01L21/30;H01L21/306;(IPC1-7):H01L21/30	主分类号	G03F7/00
代理机构		代理人
主权项
地址

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