| 摘要 |
PURPOSE:To measure and check crystal direction of a single crystal by irradiating a laser beam on the surface thereof to determine the direction of the crystal axis from the direction of a crack developed. CONSTITUTION:A laser beam 13 from a laser oscillator 12 forms a focus spot 19 with an object lens 18 passing through a half mirror 15 after reflected with a mirror 14 and then, is irradiated on the surface of a sample 20 set on a carrier 21. This develops a fine crack on the irradiation part of the single crystal and the direction of the crack is closely related to the face bearing of the crystal. An observation optical system comprising the half mirror 15, a relay lens 16, a reticle 16a and an eyepiece lens 17 can be used not only for positioning of the sample but also observing and measuring the direction of the crack. The sample base is provided with theta direction turning and measuring functions enabling the measuring of the direction of the crack with the coss line of the reticle as reference. |
