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发明名称
VORRICHTUNG ZUM BESCHICHTEN VON SUBSTRATEN
摘要
申请公布号
DE3731444(A1)
申请公布日期
1989.03.30
申请号
DE19873731444
申请日期
1987.09.18
申请人
LEYBOLD AG
发明人
ARNOLD,MANFRED,DIPL.-PHYS.DR.;WIRZ,PETER,DIPL.-PHYS.DR.
分类号
C23C14/34;C23C14/56
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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