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发明名称
VERFAHREN ZUR HERSTELLUNG VON LEITERNETZWERKEN
摘要
申请公布号
DE3731333(A1)
申请公布日期
1989.03.30
申请号
DE19873731333
申请日期
1987.09.15
申请人
SCHERING AG
发明人
TENBRINK,DETLEF
分类号
C23F1/00;G03F7/38;H01L21/48;H05K1/03;H05K3/00;H05K3/42
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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