Device for producing cold plasma for AC voltage excitation in the kHz band, preferably for producing ozone, and a method for manufacturing the device

摘要

A device is proposed for producing cold plasma for AC voltage excitation in the kHz band, preferably for producing ozone, which has a tubular dielectric, preferably made of ceramic, onto which an opposing electrode is fitted independently of the manufacturing process of the dielectric, at comparatively low temperatures. The dielectric or the opposing electrode is directly cooled. The discharge electrode, as a discrete component, rests tightly against the circumference of the dielectric and does not form an enclosed surface, being constructed, for example, in a spiral shape. The length of the elongated tube is very much greater than its internal radius. <IMAGE>