| 摘要 |
<p>The invention relates to an ion, electron or charged-particle gun. The gun comprises a source (1) of emission of charged particles, and means (2) of preaccelerating the particles. A retarding electrode (3) is placed in the vicinity of the preacceleration means (2) and is connected to an excitation circuit (4) enabling pulsed emission of particles with energy lying inside a specified energy band and their energy filtering. Application to electron or ion microlithography, and to the integrated circuit industry. <IMAGE></p> |
