摘要 |
<p>For cleaning a gas containing at least one toxic component selected from arsine, phosphine, monosilane, diborane and hydrogen selenide, the gas is contacted with a cleaning agent containing a molded composition, e.g., pellets or particles, comprising (1) manganese dioxide and (2) cupric oxide, in a wt. ratio of u.2 to 1.2: 1 having deposited thereon by a dry or wet process (3) a silver compound, preferably Ag (II) oxide, in amount of from 0.01 to 10.5% by weight of the cleaning agent. The agent may be packed into a column (1) to clean the air in duct (5) between a box (3) holding a "bomb" containing the toxic component in a gas under pressure and a blower (4) : the toxic component can thus be removed from a gas, at high efficiency and at a high rate even in case of sudden leakage of the component from a bomb.</p> |