发明名称 Patterned thin film and process for preparing the same.
摘要 <p>A patterned thin film suitable for use in electric and electronic devices, prepared from a polymer or a mixture of the polymer and other known compounds capable of forming a thin film by LB technique, said polymer having linear recurring units wherein an organic group R<1> having at least 2 carbon atoms and a valence of at least 2 is combined alternately with an organic group R<2> having at least 2 carbon atoms and a valence of at least 2 through a bivalent group formed by a reaction of an acid group A containing a hetero atom and a basic group B containing a hetero atom, and wherein a hydrocarbon-containing group R<3> having 10 to 30 carbon atoms which may contain a substituent group, is linked by covalent or ionic bond to said recurring units, the number of groups R<3> being at least 2 per 10 recurring units. The patterned thin film is prepared by building up a layer or layers of the polymer or a mixture of the polymer and a compound capable of forming a film by LB technique onto a substrate according to the LB technique, irradiating patternwise the built-up film with high enerty rays, and developing the irradiated film, or by forming the built-up film in the same manner as above on a patterned, removal film formed on a substrate, and removing the patterned film from the substrate, and if desired, by further subjecting the obtained pattern to a reaction to convert the polymer, when it has a structure as a precursor, into a polymer having a 5-membered or 6-membered heterocyclic structure.</p>
申请公布号 EP0308948(A2) 申请公布日期 1989.03.29
申请号 EP19880115635 申请日期 1988.09.23
申请人 KANEGAFUCHI KAGAKU KOGYO KABUSHIKI KAISHA 发明人 UEKITA, MASAKAZU;AWAJI, HIROSHI;MURATA, MAKOTO;MIZUNUMA, SATOSHI
分类号 B05D1/20;G01N27/414;H01L21/312;H01L29/51;H01L29/92;H01L39/02;H01L45/00;H01L51/00;H01L51/30;H01L51/40;H01L51/50 主分类号 B05D1/20
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