| 摘要 |
PURPOSE:To form a transformer to a small shape and decrease its weight in a power supply used for a sputter-ion pump and a sputtering device or the like, by obtaining a high frequency output through a separately excited high frequency inverter circuit. CONSTITUTION:A vacuum load current flowing in a sputter-ion pump is detected by a current detector circuit 3, while output voltage supplied to a vacuum load of the sputter-ion pump is detected by a voltage detector circuit 4, and detection signals from this current detector circuit 3 and voltage detector circuit 4 are used, the supplied voltage to a high frequency inverter circuit 1 is controlled by a supply voltage control circuit 5. By such constitution, the supply voltage to the separately excited high frequency inverter circuit 1 can be controlled so as to provide an output voltage current characteristic as a power supply of the sputter-ion pump by the supply voltage control circuit 5. |
