Apparatus and method for evaporating metallic films.

摘要

An evaporation apparatus containing an evaporation source, comprising a crucible (58) having a given depth and a given diameter, said crucible (58) supporting molten material (19) to be evaporated; a susceptor (57) abutting said crucible (58), said susceptor (57) having a volume commensurate with that of said molten material with said crucible prior to evaporation of said molten material; and a conductive coil (22) disposed about said susceptor (57) and said crucible (58) for coupling RF energy to said susceptor (57) and to said crucible (58). The method of evaporating material on a workpiece uses such an apparatus and comprises the steps: filling the crucible (58) with an initial volume of the material (19) to be deposited with said volume being commensurate with the volume of the susceptor (57), quickly heating the charge to a temperature at which it self-fractionates and after the material is stabilized at the desired evaporation temperature said material is deposited onto said workpiece.