| 摘要 |
<p>PURPOSE:To keep temperature rise of each module at a relatively uniform value and to keep a temperature of each LSI device at a uniform value by connecting a cooling water pipe to each module in parallel. CONSTITUTION:Modules form four lines; water of the upper two lines thereof is supplied and drained from a cooling water inlet tube 3 and an outlet tube 4 provided above. Water of the lower two lines is supplied and drained from a cooling water inlet tube 3 and an outlet tube 4 provided below. As for the modules 2 of the lower two lines, for example, the bottom module is provided with a pipe 5 and a pipe 6 at its left side and the upper module is provided with a pipe 5 and a pipe 6 at its right side. Since water runs in parallel to each module 2, each module can be changed without being affected by a piping of the above or below module. The temperature rise of each module 2 is thereby kept uniform thus keeping the temperature of each LSI device uniform.</p> |
