| 摘要 |
PURPOSE:To hold all data regarding the photomask on the photomask itself and to facilitate control over the photomask by fixing an optical storage medium where data are written to part of a photomask substrate. CONSTITUTION:The photomask 10 consists of the photomask substrate 1 which has a recessed part where the optical storage medium 2 is fitted and the optical storage medium 2 which is fixed to the photomask substrate 1 and has all data on the photomask written. Then the optical storage medium 2 consists of an information recording layer 21 where digital information on the photomask is written as a substitute for fine dot information according to a predetermined route, a protective layer 22 made of glass or plastic which protects the top of the information recording layer 21 and transmits read light, and a substrate layer 23 made of glass or plastic which protects the bottom part of the information recording layer 21. Thus, the photomask itself has all information on it, so the control over the photomask is extremely easy. |
