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发明名称
GETTERING DEVICE BY USE OF LASER LIGHT
摘要
申请公布号
JPS6482636(A)
申请公布日期
1989.03.28
申请号
JP19870242138
申请日期
1987.09.25
申请人
NEC CORP
发明人
OSHITA YOSHIO
分类号
H01L21/322;H01L21/268
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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