| 摘要 |
PURPOSE:To improve throughput drastically by performing pickup efficiently by judging confirming and non-conforming articles of pellet, advancing recognition means which can freely travel over pickup means. CONSTITUTION:By setting a wafer 3 where a non-conforming article was marked by a non-conforming mark 4 between a thrust-up means 5 and pick-up means 7 and by moving a recognition means 9 in X and Y directions, image input signal I on pellet surface is transmitted to a conforming and non-conforming discrimination means 10 in sequence. The conforming and non-conforming discrimination means 10 determines a conforming or non-conforming article by making comparison with data of conforming pellets which was previously registered and sends the coordinate of conforming pellets to a memory means 11 for temporary storage. If the coordinate of first conforming pellet 3a is A, a control means 12 shifts the pick-up means and the thrust-up means 5 to the coordinate A, pushes up the pellet at the coordinate A with the thrust-up means 5, separates conforming pellets from the wafer 3, and performs suction with the pick-up means 7. The recognition means advances and detects conforming pellets while picking up and transferring conforming pellets. |
