| 摘要 |
PURPOSE:To improve response and low-brightness limit performance by providing 1st and 2nd photoelectric element array parts which have small sample pitch and 3rd and 4th photoelectric element array parts which have large sample pitch. CONSTITUTION:This device is provided with the 1st and 2nd photoelectric element array parts 107a and 107b for the photoelectric output of a photoelectric element array part 106 which have the small sample pitch and the 3rd and 4th photoelectric element array parts 109a and 109b which have the sample pitch larger than the 1st and 2nd photoelectric element array parts 107a and 107b. The photoelectric outputs of the photoelectric element array parts 107a and 107b are used to detect a fine pattern and perform focus detection with high accuracy and the photoelectric outputs of the photoelectric element array parts 109a and 109b are used to perform focus detection for a body with fast response and low-brightness limits. Consequently, the focus detection accuracy is improved and the response and low-brightness limit performance are improved. |
