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发明名称
FORMATION OF METAL AND SEMICONDUCTOR CONTACT
摘要
申请公布号
JPS6481220(A)
申请公布日期
1989.03.27
申请号
JP19870239558
申请日期
1987.09.22
申请人
SEMICONDUCTOR RES FOUND
发明人
NISHIZAWA JUNICHI;KURABAYASHI TORU
分类号
H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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