| 摘要 |
PURPOSE:To enhance the corrosion resistance to gaseous chlorine, etc., by forming an Ni plating film by an electroless Ni plating treatment on the surface of an Al alloy and forming a 'Teflon(R)' layer on the plating film by an immersion treatment after a heat treatment at a specific temp. CONSTITUTION:After the plating film 2 is formed by the electroless Ni plating on the surface of the Al alloy 1, the plating film is subjected to the heat treatment at 80-150 deg.C. The 'Teflon(R)' layer 3 is then formed on the plating film 2 by an immersion treatment and is then subjected to a baking treatment at 60-150 deg.C, by which the corrosion resistant coating material for the turbo molecular pump is produced. The 'Teflon(R)' layer on the plating film is impregnated and is subjected to the baking treatment for enhancing the adhesive power in order to eliminate pinholes, etc., in the plating film on the base material by the heat treatment in this method and, therefore, the corrosion resistant is improved even if the pump is run in highly corrosive environment. |
