| 摘要 |
PURPOSE:To enable the increase of a processing speed and the grinding process of high efficiency by applying the constitution wherein a fixed grindstone feeds free abrasive grains to a disc and the like for generating a ultrasonic progressive wave and made of a fixed electrostrictive or magnetostrictive material giving an ultrasonic vibration on a phase-different high frequency power supply and the like. CONSTITUTION:An electrostrictive or magnetostrictive material 2 is bonded and fixed to the upper surface of a circular ultrasonic vibrator 1 and a progressive wave of ultrasonic vibration moving around a circle is generated on the vibrator 1. A notch 1a is radially cut into the tip of the circular shape, thereby amplifying the ultrasonic progressive wave under vibration and propagation. The wave propagates to a magnet and a grinding vibration effect is enhanced, thereby pressing a grindstone 3 fixed to the tip of the vibrator 2 to a polishing surface for processing. Then, the electrostrictive material 2 expands and contracts due to the application of signal voltage from high frequency power supplies 40 and 41, and the circular vibrator 1 bonded with said material 2 generates a bending vibration. Or high frequency electrical fields having a phase difference of 90 deg. in terms of time generates a progressive wave moving in one direction with time elapsed, while two standing waves are superimposed with each other. And the ultrasonic progressive waves work upon the grindstone 3, thereby enabling polishing a workpiece pressed with the grindstone 3. |
