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发明名称
摘要
申请公布号	JPS6448031(U)	申请公布日期	1989.03.24
申请号	JP19870143115U	申请日期	1987.09.21
申请人		发明人
分类号	B65G43/08;B65G49/07;G01G3/04;H01L21/68;(IPC1-7):H01L21/68	主分类号	B65G43/08
代理机构		代理人
主权项
地址

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