| 摘要 |
<p>PURPOSE:To eliminate adverse influence to nonlinear resistance characteristic and to improve durability of a nonlinear resistor by covering a section to be protected of the surface of a nonlinear sintered resistor from the state of a chip in which the sintered resistor is diced with a heat resistant inorganic insulating amorphous film. CONSTITUTION:A waferlike sintered thermistor 1 is covered with RF sputtering of 50nm-1mum in thickness with a heat resistant inorganic insulating amorphous film 2 made of one or more selected from a group consisting of SiO2, SiO, Si3N4, SiO2-XNX, Al2O3, TiO2 and Ta2O5. Electrodes 12, 13 are formed by sputtering, plating or depositing at positions not covered with the film 2. Thus, adverse influence is not affected to its nonlinear resistance characteristic, and its durability is improved.</p> |
