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经营范围
发明名称
FORMATION OF THIN FILM AND APPARATUS THEREFOR
摘要
申请公布号
JPS6480023(A)
申请公布日期
1989.03.24
申请号
JP19870236965
申请日期
1987.09.21
申请人
KANEGAFUCHI CHEM IND CO LTD
发明人
NAKAYAMA TAKEHISA;FUJIWARA TAKASHI;HOSOMI MASAHIKO;YAMAMOTO KENJI;OWADA YOSHIHISA
分类号
H01L21/205;H01L31/04
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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