MANUFACTURE OF SILICON THIN FILM,申请号JP19870236005-传众专利搜索

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发明名称	MANUFACTURE OF SILICON THIN FILM
摘要
申请公布号	JPS6480020(A)	申请公布日期	1989.03.24
申请号	JP19870236005	申请日期	1987.09.19
申请人	FUJI ELECTRIC CO LTD	发明人	HAMA TOSHIO
分类号	H01L21/205;H01L31/04	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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