| 摘要 |
PURPOSE:To obtain a light source of a much smaller size and at low-price by radiating acceleration particls to a single crystal, producing a channeling thereby, and converting the wavelength of the output X rays by selecting the type of the single crystal or the intensity of the acceleration particles. CONSTITUTION:Electron beams are accelerated by a small size accelerator 1, and after collimating them to make into parallel beams through a slit system, the electron beams are injected to a single crystal target 2. The electron beams advance through the single crystal target 2 while making a channeling, and radiating light beams are generated in the process, permeating the membranous single crystal target finally, deflected by a deflecting magnet 3 or an electrostat ic deflecting plate 3, and received by a water-cooling Faraday cup 5. The radiat ing light advance straightly while receiving no influence of the deflecting device 3, passing through optical parts such as a slit and a filter, and are led to a photoelectron spectroscope, a lithography device, or the like. By converting the energy of the incident electrons continuously, and by changing the target substance adequately, the wavelength (energy) of the radiating light can be converted continuously over a wide scope. |
