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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6477145(A)
申请公布日期
1989.03.23
申请号
JP19870234239
申请日期
1987.09.18
申请人
SEIKO INSTR & ELECTRON LTD
发明人
HOSAKA TAKASHI
分类号
H01L23/522;H01L21/3205;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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