APPARATUS FOR GROWING LIQUID PHASE,申请号JP19870231811-传众专利搜索

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发明名称	APPARATUS FOR GROWING LIQUID PHASE
摘要
申请公布号	JPS6476995(A)	申请公布日期	1989.03.23
申请号	JP19870231811	申请日期	1987.09.16
申请人	FUJITSU LTD	发明人	TANAHASHI TOSHIYUKI
分类号	H01L21/208;C30B19/06	主分类号	H01L21/208
代理机构		代理人
主权项
地址

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