| 摘要 |
PURPOSE:To improve the accuracy by deriving a conversion coefficient from a true value and a coordinate value which is read by a coordinate reader, multiplying a coordinate value of a mask object graphic by this conversion coefficient and calculating the correction quantity, and inputting a value for offsetting the deformation quantity by the correction quantity to a plotter, with respect to the coordinate value of the mask object graphic. CONSTITUTION:A graphic having principal coordinates of four points or more in which a true value (a coordinate value when there is no deformation nor error = an input coordinate value) made clear is outputted by a plotter 4 for generating a mask film 5, and a graphic containing the deformation quantity of this plotter 4 simple substance is obtained. Subsequently, by reading a position where the true value of this graphic made clear, by a coordinate reader 2, the deformation quantity added synergistically by the plotter 4 and the coordinate reader 2 is obtained, and compared with the true value, by which the deformation quantity of the whole manufacturing device of the mask film 5 is obtained. Next, by this deformation quantity and a principal coordinate position of an actual mask object graphic, a conversion coefficient is derived, and based on the coordinate value which is multiplied by this conversion coefficient, a coordinate conversion processing is executed and a correction of the deformation is executed. In such a way, the accuracy is improved. |
