| 摘要 |
PURPOSE:To make a wiring pattern minute, by applying a superconductive material as a paste state on a substrate, projecting a high energy beam on the applied superconductive material in a required pattern, sintering the material, and removing a part that is not sintered. CONSTITUTION:A superconductive thin film 2 comprising the paste of an oxide superconductive material is coated uniformly on one surface of a wiring substrate 1, while a high energy beam 3 such as laser light is projected through a condenser lens 4. In the first stage, the high energy beam at about 200 deg.C is projected, and the superconductive thin film 2 is made insoluble in accordance with the required wiring pattern. Thereafter, the superconductive thin film 2 is washed with ethanol and the like, and a part that is not sintered is removed. In the second stage, a high energy beam 3 at about 900 deg.C is projected on a wiring pattern 5, and main sintering is performed. The wiring width of the wiring pattern can be miniaturized less than several mum when the applied thickness of the thin film 2 is 1mum. |
