GROWTH METHOD OF METALLIC FILM FOR SEMICONDUCTOR DEVICE,申请号JP19870233802-传众专利搜索

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发明名称	GROWTH METHOD OF METALLIC FILM FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS6477144(A)	申请公布日期	1989.03.23
申请号	JP19870233802	申请日期	1987.09.18
申请人	NEC CORP	发明人	HAGA AKIRA;HIKI YOSHIMASA
分类号	H01L23/52;H01L21/3205	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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