MANUFACTURE OF POLYCRYSTALLINE SEMICONDUCTOR THIN FILM,申请号JP19870234323-传众专利搜索

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发明名称	MANUFACTURE OF POLYCRYSTALLINE SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPS6476715(A)	申请公布日期	1989.03.22
申请号	JP19870234323	申请日期	1987.09.17
申请人	NEC CORP	发明人	SERA KENJI
分类号	C01B33/02;H01L21/20;H01L21/263	主分类号	C01B33/02
代理机构		代理人
主权项
地址

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