Making fine particulate aluminum nitride.

摘要

A method of making fine particulate aluminum nitride, including the steps of reacting gaseous aluminum trichloride introduced via conduit (18) with aluminum-containing metallic material (12) at elevated temperature in a reactor (10) to convert some of the trichloride to monochloride gas; introducing a gaseous nitrogen source via conduit (22) to the monochloride-containing gas for reacting nitrogen with the monochloride to form fine particulate aluminum nitride in the reactor (10); conducting a flow of gas (19) comprising aluminum trichloride having the particulate nitride entrained therein to a cooling locality (24); there condensing the trichloride and accumulating the condensed trichloride and particulate nitride; and periodically reevaporating and removing the trichloride from the cooling locality (24) for separating out and recovering the accumulated nitride. The reevaporated trichloride is conducted to a condenser vessel (30) and collected in receptacle (34).