| 摘要 |
PURPOSE:To make it possible to detect the incident position of corpuscular rays, by a method wherein incident corpuscles are converted to electron and multiplied, and the relative quantity of currents divided to two electrodes is subjected to operation treatment. CONSTITUTION:The piercing orifices of substrate 14 are mutually parallel but each orifice is provided so as to be slightly inclined with respect to the perpendicular of the surface 11 thereof and a multiplying layer having secondary electron emitting property is formed to the inner wall of each substrate 14. A resistance layer 16 is formed to the back surface 15 thereof and the coductive layer 12 provided to said surface 11 is connected to the negative terminal of a voltage source 4. When incident corpuscular rays are applied to the arbitrary point on the surface, they are impinged to the inner wall of the piercing orifice 13 at the incident position to emit electron which is, in turn, multiplied. The change of currents flowed to electrodes 17, 18 is disproportional to the resistance value from the incident position to the electrodes and, therefore, the incident position can be calculated by an operation circuit consisting of integration circuits 91, 92, an analogue addition circuit 93, an analogue subtraction circuit 94 and an analogue division circuit 95. |
