发明名称 |
METHOD OF DESMEARING HOLES |
摘要 |
<p>METHOD OF DESMEARING HOLES The invention relates to a process of desmearing drilled holes in PCBs with a high aspect ratio through plasma cleaning. The plasma processing is carried out with a CF4/O2 gas mixture. By a respective selection of the CF4 contents, the method can be optimized with respect to the etching speed and uniformity through the individual drilled hole, across each individual panel and with respect to the entire panel set of the plasma reactor. It was found that an optimum is reached for these parameters with a CF4 contents of 60 Vol.% and the remainder oxygen.</p> |
申请公布号 |
CA1251519(A) |
申请公布日期 |
1989.03.21 |
申请号 |
CA19860503288 |
申请日期 |
1986.03.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
RUH, WOLF-DIETER;SCHAFER, ROLF |
分类号 |
B08B3/10;H05K3/00;H05K3/26;(IPC1-7):H05H1/32 |
主分类号 |
B08B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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